Analysis of Mems Based Gas Sensor

Abstract

Mems gas sensors are easily available in the market. Gas passes through the electrodes where Reaction takes at film and Displacement observed. The proposed structure employs aluminum electrodes with lithium niobate as base piezo electric material, coated with Zinc Oxide (ZnO) film for sensing dichloromethane (DCM) gas. This paper demonstrates the method for modelling the up rooting and electrical potential of SAW gas sensor using COMSOL Multiphysics software tool