Analysis of MEMS Based Capacitive Pressure Sensor

Abstract

This paper discusses about fundamental Analysis of MEMS based Capacitive pressure sensors. Recent times,  capacitive pressure sensors had picked up favorable circumstances over piezo resistive pressure sensor because of high affectability, low power utilization, invariance of temperature impacts. The anatomy of Capacitive Pressure sensors was analysed in this paper. The COMSOL Multiphysics Tool is utilized for the structuring of  MEMS based Capacitive Pressure sensors.